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| Properties - Corrosion resistance,Clean properties |
| Field-Semiconductors |
| Product used - NEOFLON PFA |
| Required properties - Chemical resistance, Clean properties |
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| NEOFLON PFA is widely used in peripheral equipment which help to maintain ultra-clean environments for semiconductor devices. Wafer baskets are a typical example of this. Elution of even minute quantities of metallic ions and fluoride ions is not acceptable, and this extremely pure type of PFA was developed by DAIKIN specifically to meet demands such as this. |
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