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PFA (copolymer of tetrafluoroethylene - perfluoroalkyl vinyl ether ) is widely used in semiconductor manufacturing processes for wafer baskets, fittings, piping, and tank lining because of its superior heat and chemical resistance.
Daikin's NEOFLON PFA SH Series is a high-quality PFA that meets the demanding high-purity and high-function needs in making increasingly higher integration scale and finer pattern semiconductor chips.
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The SH Series has excellent stress crack resistance because of the significantly improved flexural life cycle through polymer composition improvement. It also has increased welding strength. Comparison of the breakdown test data on nuts molded with AP-211SH and competitive PFA clearly shows that AP-211SH has higher strength and elasticity. |
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In an immersion test with chemicals used by the semiconductor industry, no statistically significant changes appeared in mechanical properties or in flexural life cycles of parts fabricated from SH products. |
| Less than 0.03% weight gain was experienced for both AP-211SH and competitive PFA in all immersion tests with the following chemicals. |
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| Less than 0.03% weight gain was experienced for both AP-211SH and competitive PFA in all immersion tests with the following chemicals. |
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Less than 0.03% weight gain was
experienced for both AP-211SH and
competitive PFA in all immersion
tests with the following chemicals. |
Extratables in 70% HNO3 at Ambient
Temperature for 7Days
(measured by Balazs Analytical Laboratory) |
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| Item (Unit) |
AP-211SH |
AP-221SH |
AP-231SH |
Test Method |
| MFR (g/10min) |
14.0 |
7.0 |
2.0 |
372 , load 5kg |
| Melting Point () |
303 |
303 |
303 |
DSC |
| Extractable F ion (ppm) |
0.1 |
0.1 |
0.1 |
in DI water, 1h at 121 |
| Specific Gravity |
2.14 |
2.14 |
2.14 |
ASTM D 792 |
| Tensile Strength (MPa) |
38 |
38 |
38 |
25, ASTM D 1708 |
| Elongation (%) |
400 |
400 |
400 |
25, ASTM D 1708 |
| MIT Flexural Life (103cycle) |
60 |
200 |
1980 |
ASTM D 2176 |
| Applications |
Fittings
Wafer
baskets
Filter
housings
etc. |
Tubing
Fittings
etc. |
Tubing
Lining
sheets
Bellows
Diaphragms
etc. |
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Please refer each product's "Material Safety Data Sheet "before use . For example:
Fluoroplastics
Although Fluoroplastics present no hazard under normal processing conditions, these safe handling points should be followed:
- WARNING: VAPORS HARMFUL IF INHALED.
- The work area should be adequately ventilated at all times because HF, COF2 may begin to be produced at above the following temperatures (PTFE. PFA=260
 , PFA=230, ETFE=180, PCTFE=150) and the volume may increases at temperatures above these (PTFE. PFA=400, FEP=300, ETFE=260, PCTFE=200). IF fluoroplastic is incinerated, the acidic gases must be removed by alkaline scrubbing techniques.
- Personnel should be cautioned against inhaling the fumes liberated during processing and provided with suitable protective equipment.
- Do not smoke in the work areas as harmful vapors and gases can be produced if fluoropolymers become transferred onto tobacco.
- Avoid breathing dust and contact with eyes.
- Wash hands and face after handling.
- Waste generated during processing should be treated by waste treatment specialists and disposed of in accordance with federal, state and local waste disposal regulations.
- Read the "Material Safety Data Sheet" before beginning processing operations.
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Fluoroelastomers
Although DAI-EL and DAI-EL-based products present no health hazard under normal conditions of use, these safe handling points should be followed:
(These are examples for peroxide cured type. So if you use the other cured type of DAI-EL, read applicable product information.)
- The work area should be adequately ventilated at all times because a slight amount of harmful vapors (e.g. hydrogen fluoride, acetone, methanol, acetaldehyde, methyl iodide and carbon monoxide) may be produced during vulcanization. A slight amount of hydrogen fluoride vapors may be produced during use at high temperatures (above 200)
- Do not incinerate DAI-EL products as this can produce harmful vapors. The safest method of disposal is in a landfill that is approved for such use and product.
- Do not smoke in the work areas as harmful vapors may be produced if DAI-EL becomes transferred onto tobacco.
- If any DAI-EL sticks to the skin or clothing, the rubber can be removed by using acetone, methyl ethyl keton or similar solvent.
- Finely divided metallic powder or filler, such as aluminum and magnesium, should not be used as compounding agents for DAI-EL because those materials are known to decompose vigorously at moderately elevated temperature.
- Read the "Material Safety Data Sheet" before beginning processing operations.
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MEDICAL USE: Fluoroplastics and fluoroelastomers are not specifically designed or manufactured for use in implantable medical and/or dental devices. We have not tested it for such application and will only sell it for such use pursuant to contract containing specific terms and conditions required by us.
IMPORTANT NOTICE: The information contained herein is based on technical data and tests we believe to be reliable and is intended for use by persons having technical knowledge and skill, solely at their own discretion and risk. Since conditions of use are outside of our control, we assume no responsibility for results obtained or damages incurred through application of the data given: and the publication of the information herein shall not be understood as permission or recommendation for the use of our fluorocarbon compounds in violation of any patent or otherwise. We only warrant that the product conforms to description and specification, and our only obligation shall be to replace goods shown to be defective or refund the original purchase price thereof.
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