Perfluoro Elastomer O-rings
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Perfluoro-Sealing Material for Semiconductors, DUPRA™

DUPRA is an extra clean sealing material made of Perfluoroelastomer for semiconductor manufacturing equipment. It has a superior high seal and heat resistance capabilities needed to meet the demands of long-term use.

Grades and Features of DUPRA™

Grades Heat Proof Temperature Processing to be Used Features Technical data sheet
DU-151 200℃ Cleaning Process It suppresses affection (trans-element) to medical liquids by the elution of low metal and low fluorine ion Technical data sheet
DU-171 CVD Process Fluorine Radical Resistance It has superior plasma and crack resistance
DU-182 CVD Process Fluorine Radical Resistance It has extremely low particle characteristics
DU-191 Etching Process Microwave Resistance * Not suitable for use in applications requiring radical resistance above 100℃
DU-192 Etching Process It has superior in plasma resistance * Not suitable for use in applications requiring radical resistance above 100℃
DU-3R1 300℃ CVD Process
Etching Process		 It has superior qualities, especially in terms of plasma resistance
DU-351 Diffusion Process It has superior plasma resistance
DU-351E Diffusion Process DU-351 has superior not sick properties
DU-353 Diffusion Process It increases the hardness of DU-351E.

*DUPRA contain articles of product numbers which come under the goods to be controlled by the Foreign Exchange and Foreign Trade Law of Japan.。Please contact us for details.

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